四阀四柱分析流程在检测含氟特种气体中杂质的应用与探索

The Application And Research of Four Valve Four Column Analysis Process For The Determination of Impurities in Fluorinated Specialty Gases

近些年来含氟特种气体市场需求不断的加大,高纯含氟气体生产工艺数据的分析与产品质量的检测对氦离子气相色谱仪提出了更高的要求,本公司就CF4中NF3杂质及SF6中O2、N2、CF4、CH4、C2F6、SO2F2、C3F8等杂质检测在GC-126PDD四阀四柱分析流程上得到很好的解决。

In recent years,fluorinated specialty gases market demand continued to increase,the analysis of production process data and the detection of product quality of high purity fluorinated gas put forward higher requirements to helium ions gas chromatograph. The company proposed a good solution for analysis of NF3 impurity in CF4 and O2,N2,CF4,CH4,C2F6,SO2F2,C3F8 impurities in SF6 with GC-126 PDD four valve four column analysis processes.