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基于多孔铁芯的微型磁通门低功耗技术研究 被引量：4

Study of Low Power Technology of Micro Fluxgate Sensor Based on Porous Core
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摘要 微型磁通门的功耗主要由最佳激励电流决定,多孔结构铁芯能够减小微型磁通门传感器的最佳激励电流,从而有效降低功耗。采用Magnet有限元仿真软件,建模分析多孔结构铁芯对微型磁通门最佳激励电流的影响,并总结了相关规律,结合MEMS的工艺,对孔的尺寸做出了设计。将实测结果和仿真结果进行对比,验证了这一规律的有效性,从而能够较好的估算孔的尺寸对最佳激励电流的影响,为模型的进一步完善和微型磁通门的结构设计提供理论和实验依据。 The power consumption of fluxgate is mainly determined by its optimum excitation current（OEC）. The porous structure core can decrease OEC and lower power consumption of fluxgate. We analyzed and designed a mi-cro fluxgate with porous core,and then derived an equation to describe the relationship between OEC and the porous structure. Based on Magnet software and FEM analysis,the effects of porous core have been simulated and analyzed, and compared with the experimental results. The results confirm the validity of the equation. The improvement sug-gestions for the process are put forward,which can provide reference for the perfection of the low power technology and redesign of the micro fluxgate sensor.
作者 吕辉 刘诗斌
机构地区 西北工业大学电子信息学院 河南理工大学电气工程与自动化学院
出处 《传感技术学报》 CAS CSCD 北大核心 2014年第11期1512-1516,共5页 Chinese Journal of Sensors and Actuators
基金 高等学校博士学科点专项科研基金(20126102110031)
关键词 MEMS 磁通门 低功耗 有限元法 MEMS fluxgate low power FEM
分类号 TP212.1 [自动化与计算机技术—检测技术与自动化装置]
  • 相关文献

参考文献16

  • 1Ripka P. Advances in Fluxgate Sensors [ J ]. Sensors And Actuators a-Physic',:d ,2003,106( 1-3 ) : 8-14.
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二级参考文献44

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共引文献30

同被引文献15

  • 1Park H S,Hwang J S,Choi W Y,et al.Development of Micro- Fluxgate Sensors with Electroplated Magnetic Cores for Electronic Compass[J].Sensors And Actuators a-Physical,2004,114(2-3):224-229.
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  • 3Lei C,Chen L,Lei J,et al.Low Power Integrated Fluxgate Sensor with a Spiral Magnetic Core[J].Microsyst Technol,2011,17(12):1697-1702.
  • 4LU H,LIU S B.Fabrication of Porous Thin Film Core for Micro- Fluxgate by Using Anodic Aluminum Oxide Templates[J].Asian J Chem,2013,25(11):5945-5947.
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引证文献4

二级引证文献10

传感技术学报
2014年 第11期

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