热处理对钛酸锶钡薄膜光学性能的影响

Effect of Heat Treatment on the Optical Properties of Barium Strontium Titanate Thin Films

采用无水溶胶-凝胶技术制备了钛酸锶钡光学薄膜，系统研究了预处理和退火温度对钛酸锶钡薄膜的相结构、微观形貌和光性能的影响，优化了薄膜的光学性能，结果表明，膜的结构和形貌直接影响其光学性能。通过150℃预处理和850℃退火获得了晶化程度良好、表面形貌平整致密的钛酸锶钡薄膜。该膜在350-1000nm的最大光透过率为80．72％，在600-1000nm的折射率稳定在-1．93左右，消光系数最小，最小值为4x10-5。

Barium Strontium Titanate （BST） thin films were prepared in sol-gel process without water in the system. Effects of the pre-heat treatment and the annealing temperature on the phase structure, micro-morphology and optical properties of BST thin films were investigated in detail. The optical properties of BST thin film were optimized. The experiment results showed that the phase structure and micro-morphology of thin films directly affected their optical properties. The good crystallized BST thin films with dense and relative smooth morphology were prepared through pre-heat treatment at 150℃nd anneal at 850℃. The transmittance maximum of the as-prepared thin film was 80.72% in the wavelength range from 350 to 1000nm. The refractive index of this sample was about 1.93 in the range from 600 to 1000nm, the extinction coefficient minimum was 4x10-5.