FePtAg-C纳米颗粒薄膜的制备及表征

FABRICATION AND CHARACTERIZATION OF FePtAg-C NANOGRANULAR THIN FILMS

采用磁控溅射法在硅基片上生长Fe Pt纳米颗粒薄膜。在硅片表面生长Mg O籽层用来引发Fe Pt合金薄膜的fct织构,加入C来减小其颗粒尺寸,加入Ag来增强其L10有序度。采用X射线衍射仪(XRD)、超导量子干涉仪(SQUID)和高分辨率透射电镜(TEM)对Fe Pt薄膜进行表征。结果表明制备的薄膜样品具有优良的L10相结构,其M-H曲线表明方形度很好,垂直矫顽力HC有2 467 k A/m,颗粒大小为10.4 nm。该薄膜非常适合用做下一代高密度磁存储媒质,可有效提高信息存储密度。

We fabricated FePtAg-C granular thin film on a bare silicon substrate by magnetron sputtering method. A MgO interlayer was grown on the substrate to induce the L10 order in the FePt alloy film. The addition of carbon can re-duce the grain size of FePt,and the addition of Ag can help enhance the L10 order in the FePt film in a relatively low tem-perature. Then we applied XRD,SQUID and high-resolution TEM to measure its texture,magnetic properties,and micro-structures,respectively. Results show that the FePt film has excellent L10 order,and the squareness of M-H loop is close to 1,with a high perpendicular coercivity of 2 467 kA/m. The microstructure shows that it has small grain size of 10.4 nm with uniform distribution. This magnetic FePt film is a promising candidate for perpendicular magnetic recording media with high density.