一种微波等离子体反应器的优化设计

Optimal design of a microwave plasma resonator

采用HFSS软件对点火腔和反应腔进行优化仿真,得出了最优尺寸的腔体。点火腔设计为压缩弯波导形状,在谐振情况,单位微波功率可产生高达1.35×104V/m的微波场强,便于产生等离子体;反应腔设计为同轴谐振腔结构,谐振情况下S11散射系数为-54,可产生较大面积的等离子体并提高了微波能量的利用率;反应腔中的石英反应管设计为螺旋结构,可延长等离子体在反应腔中的反应时间,从而提高等离子体化学反应的转化率;通过电调反射器及环行器系统来自由调节点火腔和反应腔中微波能量的分配,实现反应器等离子体点火、加热于一体的功能。

A new microwave plasma resonator has been designed by optimizing the sizes of the ignition chamber and reaction cavity using HFSS simulation software. The ignition chamber has a compression bending waveguide structure,and in the case of impedance matching,the highest field strength reaches 1. 35 × 104 V/ m,which makes it easier for the reactant gas to discharge. The reaction cavity has a coaxial cavity structure,and the S11 scattering coefficient is-54,which can generate large volume plasma and increase the utilization of microwave energy. The quartz reaction tube has a helical structure,which increases the reaction time,and therefore,the conversion rate in the plasma chemical reaction is improved greatly. The energy partition between the ignition chamber and reaction cavity can be adjusted freely by an electric adjustable reflector and circulator,and consequently,plasma ignition and heating functionality can be achieved in the designed resonator.