Al2O3陶瓷激光铣削有限元模拟与实验研究

Finite Element Simulation and Experimental Research in Laser Milling of Al2O3 Ceramic

基于ANSYS有限元分析软件建立了温度场的三维有限元模型，分析了激光铣削加工参数，如激光功率，扫描速度，光斑直径和重叠率对温度场和陶瓷表面质量的影响规律。分析结果表明，激光功率和扫描速度对材料的去除率具有重要的影响，铣削深度随着激光功率的增加而增加，随着扫描速度的增加而降低。但是，激光扫描速度和重叠率对铣削质量的影响更大，降低扫描速度及加大重叠率可以提高铣削层的质量。利用NdYAG脉冲激光器对Al2O3陶瓷样品进行了激光铣削实验，并将实验获得的深度和宽度值与模拟后获得的数值进行了对比。结果表明,数值模拟获得的宽度值和深度值与实验获得数值非常接近。数值模拟可以用来预测激光铣削深度和宽度，为陶瓷材料的激光铣削提供了一种有效的控制方法。

A three-dimensional （3D） finite element （FE） model of the temperature field is established based on ANSYS software. The effect of laser milling parameters, such as laser power, scanning velocity, spot diameter and overlapping amount on the temperature field of milling process, is analyzed, and the milling quality of ceramic materials is discussed. It is shown that the influence of laser power and scanning velocity on removing rate of materials is important, the milling depth increases with the increase of laser power and the decrease of scanning speed. While scanning velocity and overlapping rate have more important influence on milling quality, which can be improved with scanning speed and overlapping rate decreasing. The laser milling of Al2O3 ceramic sample is carried out experimentally by NdYAG pulsed laser. The milling depth and width attained in the experiments are agrement with that of numerical simulation. The results indicate that the numerical simulation is valuable for predicting the milling depth and width of ceramic materials, which provides the basis for effectively controlling the forming process in laser milling.