一种新型单色面阵均匀光源定标方法

A New Calibration Method for Monochromatic Uniform Planar Source

提出了一种单色面阵均匀光源定标的方法。针对目前单色面阵均匀光源的定标需求，改进了传统的每台设备定标的方法，搭建了单色面阵均匀光源的定标系统,并对系统各参数的不确定度进行了评定。通过对单色面阵均匀光源输出稳定性、均匀性、输出功率、输出波长的定标，可以更加完善地评价单色面阵均匀光源的整体性能，试验结果表明：单色面阵均匀光源在300~1100 nm波长范围内，稳定性为0.47%，非均匀性为0.9%，输出波长定标系数a=1.0016,b=-1.6755。根据定标数据分析可知，该定标系统完全可以满足目前单色面阵均匀光源的定标需求,对大面阵成像器件测试具有一定的意义。

A new method for calibrating monochromatic uniform planar source is proposed. In view of present need, traditional calibration method is improved and a new system is constructed. System uncertainty of each parameters is also evaluated. The overall performance of monochromatic uniform planar source can be evaluated perfectly by calibrating stability, uniformity, output power and output wavelength. Experimental results show that, between 300 nm and 1100 nm, stability of monochromatic uniform planar source is 0.47%, nonuniformity is 0.9%, calibration coefficient of output wavelength is a=1.0016, b=-1.6755, respectively. According to the data obtained, this system can completely meet the demand of calibrating monochromatic uniform planar source and has an important significance for manufacturers and users.