摘要
在扫描电子显微镜上利用1—3KV的低加速电压操作,如果电子枪的几何关系保持不变,其亮度受到空间电荷效应的影响而显著下降。本文通过试验论述了缩短三极电子枪阳极与栅极的间距是提高低压电子枪亮度的有效方法。
The brightness of electron gun of low voltage scanning electron microscopy decreases as the accelerating voltage is reduced (1-3kV) by space-charge effect when the gun is operated without change in geometry. This paper describes a method which can effectively improve the brightness of the conventional triode electron gun by reducing the distance between the anode and the grid cap.
出处
《华南理工大学学报（自然科学版）》
EI
CAS
CSCD
1989年第2期123-125,共3页
Journal of South China University of Technology(Natural Science Edition)
关键词
电子枪
亮度
扫描
电镜
操作
electron gun
brightness
anode
grid
space-charge effect
