摘要
利用Fluent软件,以N-S方程和RNGκ-ε模型为基础,采用离散相模型,对风刀吹扫去除传输镜表面颗粒物污染物的流场,以及吹扫去除过程中颗粒物的运动轨迹进行了模拟,并基于模拟仿真结果搭建了颗粒物污染捕捉和收集的装置,最终提高了传输镜表面污染物的清除效率和洁净度,并且在一定程度上避免了吹扫过程中污染物颗粒进入周围环境以造成对其他光学元器件的污染。
By using N-S equations, RNG κ-ε model and discrete phase model of Euler-Lagrange method, numerical simulations on the removal trajectories of contaminant particles of different sizes and types on the mirror surface are conducted with the commercial software Fluent. Benefiting from the simulation results, a useful device which can capture and collect debris from the mirror surface online is built. Ultimately the efficiency of cleaning and cleanliness of transport mirrors are improved. And to some extent, the chances that contaminant particles go into the surrounding environment and further pollute other optical components are reduced.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2015年第1期88-94,共7页
Chinese Journal of Lasers
基金
中以高功率激光技术国际合作研究(2010DFB70490)
关键词
激光技术
高功率激光
污染物除去轨迹
数值模拟
传输镜
洁净度
laser technique
high power laser
debris removal trajectory
numerical simulation
transport mir-rors
cleanliness