摘要
建立了电感耦合等离子原子发射光谱法测定ITi O(铟钛靶材)粉末中Fe、Ca、Mg和Sn等杂质元素的分析方法。对溶液酸度、基体干扰、共存元素干扰等进行了试验和讨论,优化了仪器工作参数,方法的精密度(RSD,n=9)为0.41%~2.51%;回收率为99%~103%。适用于ITiO(铟钛靶材)粉末中杂质元素铁、钙、镁和锡量的测定。
A method was developed to determine contents of Fe,Ca,Mg and Sn in indium titanium target material powder by inductively coupled plasma- atomic emission spectrometry( ICP- AES). Acidity of the solutions,matrix interference and interference of coexisting elements were tested and discussed, instrument working conditions was optimized. The precision of the method was in the range of 0. 41% ~ 2. 51% of RSD( n = 9) and the recovery was 99% ~103%. The proposed method can meet the requirement for routine analysis.
出处
《广州化工》
CAS
2015年第2期81-82,140,共3页
GuangZhou Chemical Industry