摘要
研究了靶材不同加工工艺的组织,通过多向锻造,在变形量为80%,热处理工艺为1 050℃×90 min,制得的靶材具有均匀的等轴晶组织,晶粒尺寸40—100μm。
Structures of spin coating niobium target from different processing technologies were studied. The results showed that through muti-direction forging,with the deformation of 80% and heat treatment process of 1050 ℃ × 90 min,the prepared targets have a homogeneous equiaxed structure and a grain size of 40—100 μm.
出处
《材料开发与应用》
CAS
2014年第6期54-57,共4页
Development and Application of Materials
基金
宁夏东方钽业股份有限公司项目(SJ04-13-1)
关键词
旋转镀膜铌靶材
工艺控制
晶粒尺寸
spin coating niobium target
process control
grain size
