VHF频段三角形微机电谐振器的分析与设计

Analysis and design of trilateral micro electro-mechanical system resonator in VHF band

设计了一种工作于VHF频段的新型微机电谐振器,采用了一种以阵列方式降低谐振器动态电阻的方法,通过ANSYS有限元分析软件对谐振器进行模态分析。结果表明,与减小换能电容间隙和增大偏置电压相比,采用的方法可以减小动态电阻,增大功率容量,谐振器阵列可以在保证谐振频率不变的情况下提高品质因数、减少损耗、降低动态电阻。设计的谐振器与谐振器阵列的工作频率为123 MHz。

A novel micro electromechanical system（MEMS） resonator working in VHF band was designed;the method reducing the resonator motional resistance was used by using an array form. This resonator was analyzed by ANSYS. Results show that compared with degrading the electrode-to-resonator gap and raising the DC-bias voltage, the method can degrade the motional resistance and increase power capability. The array of resonators has characteristics such as high quality factor, low energy loss and small motional resistance under the condition of invariable resonant frequency. Both of the operation frequency of the resonator and the array of resonators are 123 MHz.