光电式光栅刻划机干涉控制系统及精度分析

Interference control system and accuracy analysis of photoelectric grating ruling engine

采用莫尔条纹法对光栅干涉仪在工作过程中产生的干涉条纹进行分析,利用莫尔条纹的平均误差作用减少光栅刻划过程中的局部误差。实验研究表明,该方法控制光栅刻划机刻划出300l/mm和600l/mm的光栅,受环境影响小、结构简单且装调方便。

With Moire fringe average error method ,interference fringes produced in the operation of grating interferometer are analyzed to reduce the local error . Experimental studies show that 300 l/mm and 600 l/mm gratings are ruled out with the method ,and the grating ruling engine control system using moire fringe method have low environmental impact ,simple structure and is simple , easily adjusted and influenced less by the environment .