周期极化压电陶瓷表面形成声表面波的仿真及分析

Simulation and experiment study of surface acoustic wave formation on the periodically poled piezoelectric ceramic surface

对周期极化压电陶瓷表面形成声表面波的机理进行了分析,指出周期极化压电陶瓷表面形成的声表面波是由于相邻压电体极化方向相反,导致相邻压电体沿极化方向发生伸缩变化,从而在压电陶瓷表面形成的。通过对周期极化压电复合结构进行谐响应仿真分析,结果表明:在周期极化压电陶瓷表面形成的声表面波是瑞利声表面波,表面波的振幅达到压电体厚度的18%,振幅相对较大。并且通过实验研究,验证了周期极化压电陶瓷可以激发出瑞利声表面波。

The mechanism of surface acoustic wave on the periodically poled piezoelectric ceramic is studied. It is the adjacent piezoelectric body polarization in opposite directions that causes adjacent piezoelectric body expansion variation along the direction of polarization, resulting in the elastic wave propagation in piezoelectric ceramic surface. The simulation results show the Rayleigh surface acoustic wave can be formed on the surface of periodically poled piezoelectric ceramic through harmonic response of the simulation analysis, and the amplitude of acoustic wave is relative large. The experimental results verify that the periodically poled piezoelectric ceramic can excite the surface acoustic wave, which is consistent with the simulation results.