摘要
MEMS仿生矢量水听器应用于水下环境,必须解决透声,绝缘,流激噪声抑制等问题.为此,提出"三明治"式封装结构.完成了"三明治"式封装结构设计计算与试制测试;并通过典型使用环境试验验证该封装结构的流激噪声抑制能力.试验结果表明:该封装结构在几乎不损失灵敏度和矢量性的前提下,比前期的封装结构在抑制流激噪声能力方面提高20dB以上.
The problem about sound transmission,insulation and flow noise control must be solved when MEMS vector hydrophone be used in water.Therefore a “sandwich”-type package structure for MEMS vector hydrophone was put forward to solve these problems,the design,simulation,manufac-ture,and testing works had been fulfilled.The flow-induced noise immunity of the package structure was verified by using typical environmental testing.The experimental results of MEMS vector hydro-phone with “sandwich”-type package in typical application environment showed that the ability of flow noise control of new structure is 20 dB higher than the current package structure,and no loss for sensi-tivity and directional character.
出处
《测试技术学报》
2015年第1期14-19,共6页
Journal of Test and Measurement Technology
基金
国家863资助项目(2011AA040404)
国家青年科学基金资助项目(51205374)
