激光位移传感器实时测量超声波振幅和频率的试验研究

Experimental Study on Measurement of Ultrasonic Vibration Amplitude and Frequency Using High-Speed CCD Laser Displacement Sensor

超声波振动技术已经广泛应用于各类生产加工行业.但是,目前为止有关超声波振动实时监测方面的研究鲜有报道.本文提出了一种可行的实验方法对超声振动进行实时监测.超声波的振动由超声波发生器及其传递装置产生;通过使用世界领先的超高速、高精度电容耦合装置激光位移传感器对超声波振动进行实时跟踪和测量;所测振动数据由计算机存储并且开发了一系列Matlab程序进而从原始数据中滤除噪声对超声波振动数据的干扰.结果显示:通过这一实验方法能够对超声波振动频率和周期进行精确评估,尤其是能够对超声波振幅进行精确测量,其测量精度可达到±0.1μm.超声波功率对超声波振幅的影响也可以通过这一实验方法显著呈现.

Ultrasonic technology has been widely used in the manufacture industry.However,there are few published reports about real-time monitoring of the ultrasonic vibration.An experimental method was presented to track and measure the ultrasonic vibration in this paper.A state-of-art ultra high-speed/high-accuracy charge-coupled device （CCD）laser displacement sensor is used to track and measure the ultrasonic vibration from ultrasonic generator,then a series of Matlab programs are developed to fil-ter noise from original data.The ultrasonic vibration frequency and period are evaluated and the ultra-sonic amplitude is measured within accuracy ＆#± 0.1 μm.Effect of the ultrasonic power on the ultrasonic amplitude is also investigated.