基于预紧理论的大尺寸光刻机驱动精度控制

Driving Accuracy Control Technology of Large Size Lithography Machine Based on Preload Theory

以基于预紧理论的大尺寸光刻机驱动精度控制技术为研究课题,以Hertz接触理论为基础,提出通过对角接触球轴承施加预紧力的方法,来提高光刻机滚珠丝杠驱动精度。课题通过对角接触球轴承动力学分析,构建了角接触球轴承预紧计算方法,并进行了实例设计计算,经生产实践证明了该技术方法可以进一步提高光刻机驱动系统精度。

In this paper, ＂driving accuracy control technology of large size lithography machine based on preload theor）,＂ is taken as the research subject, and based on Hertz contaot theory, the method of applying preload to angular contact ball bearing is proposed to improve the ball screw driving accuracy of lithography machine. Through the dynamics analysis of angular contact ball bearing the calculation method for preloaded angular contact ball bearing is constructed and applied to the actual example. The experiment analysis result showed that the method carl improve the driving accuracy of lithography machine.