烧结温度对ZrO_2薄膜表面形貌及力学性能的影响

Effect of Sintering Temperature on the Surface Morphology and Mechanical Properties of ZrO_2 Films

采用溶胶-凝胶法在玻璃基体表面制备了经300℃,400℃和500℃烧结热处理的ZrO2薄膜。利用X射线衍射仪、原子力显微镜和纳米压痕仪研究了烧结温度对ZrO2薄膜表面形貌和力学性能的影响。实验结果表明,随着烧结温度的增加,ZrO2的晶体结构由少量的单斜晶相逐渐转变为单斜晶相和四方晶相的混合相。薄膜表面形貌逐渐改善,薄膜的表面粗糙度和颗粒度依次减小,薄膜的表面粗糙度分别为10.5nm、7.2nm和5.6nm,ZrO2的粒径分别为188nm、153nm和130nm。ZrO2薄膜的弹性模量和硬度都显著提高,薄膜的弹性模量分别为89.6GPa、114.2GPa和128.9GPa,薄膜的硬度分别为7.6GPa、10.3GPa和15.1GPa。

Zirconia films,sintered at 300 ℃,400 ℃ and 500 ℃,were prepared on glass surface by solgel method. The effect of sintering temperature on the surface morphology and mechanical properties of ZrO2 films were characterized by means of X-ray diffraction,atomic force microscopy and nanoindenter.The results showed that,with the increase of sintering temperature,the crystal structure of ZrO2 from small amount of monoclinic phase gradually transfer to the monoclinic phase and tetragonal phase mixture. The surface morphology of the ZrO2 films were gradually improved,the surface roughness of the films and the particle size were decreased. After sintering at 300 ℃,400 ℃ and 500 ℃,the surface roughness of the films were about 10. 5 nm,7. 2 nm and 5. 6 nm,the grain size of ZrO2 were about 188 nm,153 nm and 130 nm,respectively. Furthermore,the hardness and elastic modulus of the ZrO2 films were significantly improved. The elastic modulus of the films were about 89. 6 GPa,114. 2 GPa and 128. 9 GPa,the hardness of the films were about 7. 6 GPa,10. 3 GPa and 15. 1 GPa,respectively.