激光三角法在物面倾斜时的测量误差研究

Research on measurement error while workpiece surface is inclining by laser triangulation

相比传统的触针式测量,激光位移传感器因其高精度和非接触式测量的优点,在机械工程中已广泛使用。鉴于激光三角法的设计原理,当工件产生倾斜角时,激光位移传感器会产生误差。通过激光位移传感器、精密电移台、精密旋转台构建了实验测量系统,对测量数据使用Matlab进行分析,所用电移台的重复精度小于5μm,测得了不同倾斜角度下激光传感器的误差,用最小二乘法拟合进行了误差补偿。实验证明:误差标定后,激光传感器在测量倾斜物面时仍能保证高精度。

Compared with traditional touch measurement,laser displacement sensor has been widely used in mechanical engineering for its high precision and property of non-contact measurement. According to design principle of laser triangulation,laser displacement sensor will produce errors when there is a slant angle over the workpiece. To solve this problem,build an experimental measurement system by using a laser displacement sensor,a precise electric displacement platform and precise rotary platform; analyze measurement datas by Matlab;repeatability of electric displacement platform is less than 5 μm obtain errors under different slant angles,and employ least squares fitting for error compensation. Experiment verify that laser displacement sensor can still ensure high precision in measuring inclined plane of objects with slant angles after error calibration.