在玻璃衬底上制作K^+离子交换掩埋波导的新工艺

A new fabrication technology of K^+-ion exchange buried waveguides on glass substrates

本文报道用不同离子两步交换技术,在玻璃衬底上制作K^+离子交换掩埋波导的新工艺,它不要求施加外电场。用X射线能谱(XES)分析技术测试了K^+离子的浓度分布,证明所制出的样品是掩埋波导。

A new fabrication technology of K+-ion exchange buried waveguides in glass substrates is presented for the first time, which includes two-step ion exchange processes in different chemicals. The processes are simple, feasible and unnecessary to apply electric field. X-ray energy spectrometry analyses show the guides are buried ones.