非球面拟合球面的数据处理方法研究与实现

A Research and Implementation on The Method of Aspheric Fitting Spherical Data Processing

在轮廓仪检测光学元器件利用非球面去拟合球面数据时,采用数据校准的方法生成新的数据。对比轮廓仪的检测数据与该方法生成的数据,结果表明生成的数据与轮廓仪的检测数据一致。本文采取的非球面拟合球面的数据处理方法有效的弥补了轮廓仪生成非球面数据的曲率半径有限的不足,扩展了其曲率半径范围。该方法已经应用到抛光加工中,可以有效的利用生成的数据来指导抛光加工生产,并得到抛光工程师的认可。

Using the method of calibration data to generate new data as aspheric fitting spherical surface data in detecting optical compo- nents by contourgraph. Contrast testing data by contourgraph and the generated data, the results show that the generated data is in ac- cordance with testing data by contourgraph. This paper proposes a new method that using aspheric surface fitting spherical It makes up for the deficiency of aspheric surface curvature radius of contourgraph effectively, extended its curvature radius The method has been applied to the polishing process and the new data is helpful in guiding the polishing processing. Now the new method has got polishing Engineer approval.