Zn离子注入LiNbO3晶体的制备及其红外谱特性研究

Preparation of Zn Ion Implantation LiNbO_3 Crystal and Its Infrared Spectral Properties

利用离子注入技术制备了不同Zn离子剂量掺杂的铌酸锂样品,研究了Zn离子注入对Li Nb O3晶体红外光谱特性的影响。实验结果显示Zn离子已成功地注入到Li Nb O3晶体中,以Zn原子纳米颗粒形式存在,且注入深度约为80 nm。与纯Li Nb O3晶体在3486、2851和2917 cm-1处的主次吸收峰的位置相比,三种掺杂Zn离子剂量的样品主吸收峰的位置均出现在3483 cm-1处,发生了微小的红移,次吸收峰的位置基本保持不变。Zn离子注入使x-切向Li Nb O3晶体的透射率增大,z-切向Li Nb O3晶体的透射率降低。

LiNbO3 samples with different kinds of Zn ions implantation concentration are prepared by ion implantation technology and the influence of Zn ions implantation on the infrared properties of LiNbO3 crystal is also studied. The results show that Zn ions have successfully been implanted into the surface of LiNbO3 crystal in the form of nanoparticles and the depth is about 80 nm. The pure LiNbO3 crystal occurs the primary and secondary peaks where are in 3486 cm-1, 2851 cm-1, 2917 cm-1, respectively. And the primary absorption peaks of the samples with three different kinds of Zn ions implantation concentration are all in 3483 cm-1. With respect to pure LiNbO3 crystal, the position of the primary absorption peaks occur slight redshift. The position of the secondary absorption peaks almost do not changes. Zn ions implantation enhances the transmittance of x-cut LiNbO3 crystal, but reduces the transmittance of z-cut LiNbO3 crystal.