不同衬底对喷雾热解法制备CuInS_2薄膜的影响

Substrates Effects of CuInS_2 Thin Film Prepared by Spray Pyrolysis

在有钼条薄膜的玻璃衬底上用喷雾热解法制备了CuInS2薄膜.利用台阶仪、光学显微镜和X射线衍射仪等对样品的结构和形貌进行了表征.研究了钼与玻璃衬底对喷雾热解法制备出的CuInS2薄膜的影响.结果表明,无论是薄膜结晶性,均匀性,表面平整度,还是应力与附着力等方面,在钼衬底上制备的CuInS2薄膜均表现出更优异的性能,说明了在对CuInS2薄膜性能的研究中考虑底电极的影响是合理的.

CuInS2 thin films were prepared by spraypyrolysis on molybdenum and glass substrates. The morphologies and microstructures of the samples were characterized by X-ray diffraction, surface profilometry, optical microscope, respectively. The effects of the difference between molybdenum and glass substrates in prepared CuInS2 film by spray pyrolysis were investigatedl The results show that CuInS2 films prepared on Mo substrates exhibited superior performance in crystallinity, uniformity, surface roughness, stress and adhesion aspects. It explained the rationality of the effect of back electrode material for CuInS2 thin films.