Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process
Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process
关键词
制造工艺
MEMS
碳基
HOPG
微机电系统
光致抗蚀剂
热解石墨
共振频率
Carbou-MEMS （micro-electromechanical systems）, cantilever, trial fabrication, resonance frequency, Raman spectra, HOPG.
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