直边衍射激光驻波场中铬原子的沉积特性研究

Research of deposition characteristics of Cr atoms in laser standing wave field with straight edge diffraction

为了研究沉积基片对激光驻波场的影响,基于半经典理论,采用4阶龙格-库塔算法对直边衍射效应影响下铬原子的3维运动轨迹和3维沉积条纹结构进行了仿真。研究了激光束腰中心到反射镜的距离、高斯激光束腰半径对最终沉积过程的影响。结果表明,通过适当地调节实验参量,可以改变激光驻波场受到衍射效应的程度;当反射镜位于激光束腰截面处、高斯激光束腰半径为62.5μm时,纳米沉积条纹的质量最理想。这将为原子光刻实验提供有益的理论依据和数据信息。

In order to study the diffraction effect of deposition substrate on laser standing wave field,3-D motion trail and stripe structure were simulated using the fourth-order Runge-Kutta algorithm under straight edge diffraction effect based on the semi-classical theory. The distance from laser beam waist center to mirror and the effect of the radius of Gaussian laser beam waist on the process of final deposition were discussed. The results show that diffractive degree will be changed by adjusting the experiment parameters reasonably. The quality of deposition stripe structure will be achieved optimally when the mirror is placed on the cross section of laser beam waist,and the radius of Gaussian laser beam waist equals62.5μm. It provides the useful theoretical foundation and data information in the field of atomic lithography study.