摘要
为了使主振荡功率放大结构的Ar F准分子激光器实现双腔同步放电,采用同步逻辑快速响应双腔放电时序,根据同步控制逻辑自动对双腔延时进行精密调节,使用四位二进制计数器实现粗调搜索,快速缩小双腔延时差,而使用通用数字可编程延时芯片来实现小精度延时调节。结果表明,双腔放电同步调节之后,放电时差稳定在23ns左右,同步抖动小于±3ns,满足4k Hz高重复频率下主振荡功率放大结构准分子激光器同步控制的要求。
In order to achieve synchronous discharge of dual-chambers of an Ar F excimer laser based on master oscillation power amplifier(MOPA) structure,synchronization logic was used to respond to dual-chamber discharge timing sequence quickly. According to synchronization control logic,an automatic precision adjustment to dual-chamber delay was made. Coarse search was implemented by using a high-speed synchronous modulo-16 binary counter and dual-chamber delay difference was narrowed quickly. Small precision delay adjustment was achieved by using universal digital programmable delay chip. The results show that discharge time differences steadies at about 23 ns less than ± 3ns synchronization jitter after dual-chamber discharge synchronous adjustment. It can meet MOPA structure excimer laser synchronous control requirements under high repetition frequency of 4kHz.
出处
《激光技术》
CAS
CSCD
北大核心
2015年第2期233-236,共4页
Laser Technology
基金
国家科技重大专项基金资助项目(2013ZX02202004)
关键词
激光器
同步控制
同步逻辑
粗调延时
细调延时
lasers
synchronous control
synchronous logic
coarse delay
fine delay