调制周期对Ti-TiN-Zr-ZrN多层膜性能的影响

Influence of Modulation Period on Mechanical Behavior of Ti-TiN-Zr-ZrN Multi-Layered Coatings

采用真空阴极电弧沉积技术,在TC11钛合金表面沉积同等厚度的三种不同调制周期Ti-Ti N-Zr-Zr N软硬交替多层膜。用扫描电镜、显微硬度计、结合力划痕仪和砂粒冲刷试验仪分析测试了多层膜的厚度、表面及截面形貌、硬度、膜/基结合力和抗砂粒冲蚀磨损性能等;重点研究了调制周期的改变对多层膜性能的影响。结果表明:随着周期数的增加,单一调制周期变薄,膜层中金属"液滴"颗粒等缺陷减少,同时也增加了大量的层间界面;层界面之间反复形核,晶粒细化,有利于多层膜表面光洁度、致密度、硬度、结合力和抗砂粒冲蚀能力的改善。

The Ti-TiN-Zr-ZrN multilayered coatings were synthesized by vacuum cathodic arc deposition on substrate of TCll Ti alloy. The influence of the modulation period, on the microstructures and mechanical properties was investigat- ed. The coatings were characterized with scanning electron microscopy Auger electron spectroscopy, and conventional me- chanical tools. The results show that the period number and thickness of one period have a major impact on the mi- crostructures and mechanical properties, including hardness, erosion-resistance, and interfacial adhesion. For example, an increase of period number and a decreased period thickness resulted in considerable reduction of droplet density on the surface, an increased number of interface, a decreased grain size, an improved surface smoothness and compactness, a heightened surface hardness and erosion-resistance, a strengthened adhesion at the interface of Ti-TiN-Zr-ZrN coating and substrate. Possibly mechanisms, responsible for the improved mechanical behavior, were tentatively discussed.