基于声表面波聚二甲基硅氧烷薄膜形变研究

Study on Deformation of Poly(Dimethylsiloxane)Film Based on Surface Acoustic Wave

提出了一种新的聚二甲基硅氧烷薄膜形变方法。在128°YX-LiNbO3压电基片上光刻叉指换能器,其激发的声表面波在压电基片上亲水表面的阻力共同作用下挤压微槽内水相微流体,使得其上的聚二甲基硅氧烷薄膜发生形变。采用红色染料溶液微流体为实验对象进行聚二甲基硅氧烷薄膜形变实验,结果表明,所提出的方法可有效实现聚二甲基硅氧烷薄膜形变,且与激发声表面波的电信号功率、水相微流体的体积及薄膜厚度有关。在13μL水相微流体,薄膜厚为12.5μm,电信号功率为26.5dBm时,薄膜最小形变距离为280μm。

A new method for deforming the poly（dimethylsiloxane）（PDMS）film is presented in this paper.An IDT is fabricated on a 128°YX-LiNbO3 substrate for exciting surface acoustic wave,which is used to squezze the aqueous microfluid in the PDMS microgroove on the piezoelectric substrate by the help of the resistance from the hydrophilic surface.Then,the PDMS film is deformed by the pressure of the aqueous microfluid.Red dye solution is used to demonstrate the operation of the deformation of the PDMS film.Results show that the proposed method can deform PDMS film,and the electrical signal power,the volume of the aqueous microfluid and the thickness of the PDMS film do also affect the deformation.A minimum distance of 280μm is obtained at the conditions of 13μL of the volume of the aqueous microfluid,12.5μm of the thickness of the PDMS film and 26.5dBm of electric signal power.