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MEMS惯性技术的发展及应用 被引量：21

Evolution and application of MEMS inertial technology
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摘要 MEMS惯性技术是近年来战术级惯性导航的研究热点,也是惯性导航技术未来的主要发展方向之一。本文介绍了MEMS惯性传感器的发展概况,结合Draper实验室的MEMS惯性系统项目计划介绍了MEMS惯性系统的发展,分别介绍了MEMS惯性测量单元和MEMS组合导航技术的最新进展,并展望了MEMS惯性系统的发展趋势。高性能MEMS陀螺、芯片级MEMS-IMU和MEMS组合导航系统是MEMS惯性技术未来的发展趋势。 Micro Electro Mechanical Systems （MEMS） has become a research hotspot of the tactical inertial navigation, and one of the main research directions for future inertial navigation technology. This survey is conducted for the development and application of MEMS inertial navigation. A brief introduction of MEMS inertial sensors is first given, also the development of MEMS inertial system is introduced by the research program of Draper laboratory, then the latest developments of MEMS inertial measurement unit （IMU） and MEMS integrated navigation system has been surveyed, at last the development trend of MEMS inertial system has been summarized. High-performance MEMS gyros, chip scale MEMS-IMU and MEMS integrated system is the development trend of the MEMS inertial technology.
作者 齐广峰 吕军锋
机构地区 海军装备部 北方光电股份有限公司
出处 《电子设计工程》 2015年第1期87-89,92,共4页 Electronic Design Engineering
关键词 微机电系统 惯性测量单元 惯性导航系统 组合导航 MEMS IMU INS integrated navigation
分类号 TN967.2 [电子电信—信号与信息处理]
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参考文献10

  • 1Grewal M S,Weill L R,Andrews A P. Global positioning systems, inertial navigation, and integration (2nd edition)[M]. John Wiley&Sons, Inc,2007.
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二级参考文献5

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共引文献7

同被引文献192

引证文献21

二级引证文献113

电子设计工程
2015年 第1期

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