硬盘微晶玻璃基板化学机械抛光研究

Investigation on Chemical Mechanical Polish of Glass Ceramics Substrate of Hard Disk

利用自制的抛光液对硬盘微晶玻璃基板进行化学机械抛光。研究了抛光压力、SiO2浓度、pH和氧化剂过硫酸铵浓度等因素对材料去除速率MRR和表面粗糙度Ra的影响,系统分析了微晶玻璃抛光工艺过程中的影响因素,优化抛光工艺条件,利用原子力显微镜检测抛光后微晶玻璃的表面粗糙度。结果表明:当抛光盘转速为100 r/min、抛光液流量为25 m L/min、抛光压力为9.4 k Pa、SiO2浓度为8wt%、pH=8、过硫酸铵浓度为2wt%时,能够得到较高的去除速率(MRR=86.2 nm/min)和较低表面粗糙度(Ra=0.1 nm)。

In this work,chemical mechanical polish experiments were done on glass ceramics substrates using self-made polishing liquid. The effects of polishing pressure,concentration of SiO2,pH of slurry and concentration of oxidant（（NH4）2S2O8） on the material removal rate and the surface roughness of the glass ceramics substrate were investigated. The polishing process conditions were optimized by analyzing the influence factors of the glass ceramics CMP technique systematically,then the surface roughness of glass ceramics substrate after polishing was measured by an Atomic Force Microscopy（AFM）. The results show that under the following CMP conditions： 9. 4 k Pa,8wt% SiO2,pH = 8 and2wt%（NH4）2S2O8,the MRR and the Ra could attain 86. 2 nm/min and 0. 1 nm,respectively.