纳米TiO_2敏感膜修饰的QCM气体传感器检测氨气的研究

Research for Detection of Ammonia Gas Through QCM Gas Sensor Modified by Nanometer TiO_2

主要介绍了纳米TiO2修饰的QCM（Quartz Crystal Microbalance）气体传感器的制备与测试。在石英晶振片表面制备纳米TiO2敏感膜,构成QCM氨气传感器。检测系统为自主研发的基于LabVIEW平台的QCM气体传感器频率测试软件。检测氨气的体积分数为1×10-5～^5×10^-5,响应时间均在10 s以内,响应最大频差值与氨气浓度呈现良好的线性关系,相关系数为0.999 4。室温条件下,纳米TiO2敏感膜可以完全实现吸附解吸过程,具有可逆性。该传感器性能稳定,响应灵敏,具有重复性。

This paper mainly introduced the preparation and test of nanometer TiOz modified QCM （Quartz Crystal Microbal- ante） gas sensor. Using nanometer TiO2 sensitive film on the Quartz Crystal surface to constitute the QCM ammonia gas sensor. The detection system was self-developed frequency testing software of QCM gas sensor based on LabVIEW platform. The concentration of the detected ammonia gas was l×10-5~5×10-5, and the response time was within 10 seconds. The respond to the frequency difference value exhibited an exact linear relationship with the concentration of the ammonia gas. Under the condition of room tem- perature, the nanometer TiO2 sensitive film had reversibility which can fully achieve the adsorption and desorption process. The sensor is with stable property, sensitive response and good repeatability.