非接触式曲面测头设计及精度试验研究

Design and Precision Experiment of Non-Contact Surface Probe

针对激光测头因测量范围小难以满足大量程自由曲面的高精度测量要求的问题,基于伺服运动控制技术,集成激光测头和光栅尺研制了一种非接触式测头。控制激光测头工作在线性度误差较小的中心范围内、而采用光栅尺反馈实现大范围的测量,详细介绍了系统的硬件及软件设计。试验数据处理结果表明,与激光测头相比,研制的非接触式测头测量范围扩大了1倍,而测量不确定度、修正值、线性度等精度指标并没有下降。

The laser probe is difficuh to meet the high accuracy measurement requirements for wide-range free-form surface due to its small measurement range.A non-contact probe integrated laser probe and grating ruler was designed by the servo motion control technology.The laser probe was controlled in the center range and its linearity error was smaller, and the grating ruler was used to feedback to achieve wide-range measurement.The system hardware and software design were introduced in detail.Compared with laser probe, experimental data processing results show that the non-contact probe measuring range is expanded 1 times while its accuracy index have not declined such as the measurement uncertainty, correction value, linearity ,and etc.