摘要
半导体分析仪作为目前半导体器件I-V特性曲线的最重要测量仪器,其微小电流低至pA量级,准确度至1%,采用常规直接测量方法无法实现,论文在研究校准方案的基础上,利用"加压测流法"对GΩ量级高值电阻器进行标定,设计与其配套的无源低电流适配器,巧妙利用Guard技术实现对pA、nA量级微小电流的校准。采用"传递比较法"与上级机构对1pA^10nA的微小电流进行验证,试验数据验证了论文校准方案的正确性。论文技术成果已经应用于半导体工艺线源表类测试系统的校准中,值得借鉴推广。
At present,Semi-conductor analyzer is the most important instrument for I-V curve test,whose current scale down to pA,and accuracy to 1%.Direct-Measurement can＇t realize the mission above.A calibration method on High-value resistance through＂FVMI＂method on the basis of the whole calibration scheme is given.In order to solve the problem on micro-current calibration,an Adapter is fabricated and the Guard technology is studied.The test results validate the calibration method,through compare 1pA to 10 nA current with superior metrology department.The research method above has already been applied in＂Semiconductor Technics Flow＂widely.
出处
《计算机与数字工程》
2015年第1期17-20,43,共5页
Computer & Digital Engineering
