摘要
通过射频磁控溅射技术在玻璃衬底上制备AZO薄膜,研究膜层厚度对AZO薄膜光电特性的影响。发现随着膜层厚度的增加,AZO薄膜在可见光区的平均透射率略微增长,而方块电阻和电阻率却显著递减,导致其品质因子随厚度增加而增加。在薄膜厚度为395 nm时,获得电阻率为3.24×10-3Ωcm,可见光区平均透射率为85.52%,品质因子为25.52×10-4Ω-1的光电性能良好的透明导电薄膜。本文制备的薄膜具有较优的透明导电性,可以广泛应用于太阳能电池、平板显示器等光电领域。
Transparent conducting Al-doped zinc oxide（AZO） films were deposited on BK-7 glass substrates by radio frequency magnetron sputtering. The effect of thickness on electrical and optical properties of AZO films was studied. Results indicated that the figure of merit decreased as the average transmittance in visible spectral region for all samples slowly increased and the resistivity of the film sharply decreased when the thickness of AZO films increased. The highest figure of merit of 25.52×10^-4 Ω-1, with the lowest sheet resistance of 82 Ω/sq and the average transmittance of 85.52% was obtained when the thickness of AZO films was 395 nm. As-prepared AZO films with good transparent conductive properties can be widely used in various fields such as solar cells and flat panel displays.
出处
《陶瓷学报》
CAS
北大核心
2015年第1期23-26,共4页
Journal of Ceramics
基金
福建省自然科学基金资助项目(编号:2007J0317)
福建省科技厅重点项目(编号:2007H0019)
福建省教育厅基金资助项目(编号:JB06104)
关键词
透明导电膜
掺铝氧化锌
磁控溅射
光电学性质
aluminum-doped zinc oxide film
thickness
electrical properties
optical properties
