摘要
采用热丝化学气相沉积法制备金刚石涂层微细刀具的过程中,刀具表面温度场分布的均匀性与稳定性对金刚石涂层的质量具有决定性的作用。本文采用有限容积法,对微细刀具表面沉积金刚石涂层过程中的温度场分布进行了仿真研究,采用Taguchi正交试验法考察了热丝直径d、热丝高度H、热丝间距D以及热丝长度L对温度场均匀性的影响,并获得了最优参数组合,即d=0.65mm,H=12mm,D=27mm以及L=160mm。对比仿真与实际测温试验结果,发现两者之间的偏差不超过4%,验证了仿真模型具有较高精度。采用仿真获得最优参数进行的沉积实验结果表明,放置在沉积区域不同位置的微细刀具表面均被涂覆了一层厚度均匀、组织结构良好的金刚石涂层,从而验证仿真结果的正确性。
The temperature field in growth of diamond coatings by hot filament chemical vapor deposition（HFCVD）on substrates of micro-tool array was physically modeled,numerically simulated in finite volume method,and experimentally tested to optimize the growth conditions.The impact of the filament specifications,including the diameter（d）,filament-substrate distance（H）,filament-spacing（D）,length（L）,on the uniformity and stability of the temperature field distribution was investigated by Taguchi＇s orthogonal array experiment.The discrepancy between the simulated and measured temperature field distribution was less than 4%.The diamond coatings,grown with the optimized filament arrangement（d=0.65 mm,H=12mm,D=27mm and L=160mm）,were characterized with scanning electron microscopy and Raman spectroscopy.The surfaces of micro drill bit array were found to be uniformly covered with the homogeneous,fine-faceted crystalline diamond coatings.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2015年第2期166-173,共8页
Chinese Journal of Vacuum Science and Technology
基金
国家重大科学科技专项课题(编号:2012ZX04003-031)
