大气压射频均匀辉光放电的条件

Dependence of Large-Area Homogeneity on Atmospheric-Pressure Glow-Discharge Conditions

大气压放电应用在很多领域时,其放电的均匀性显得十分重要。本文通过实验得出影响大气压射频放电的均匀性的条件。实验中研究的影响因素有介质阻挡、放电电压、放电气体组成以及放电间隙。实验采用单反照相机以及ICCD照相机对放电进行拍照,观察不同参数放电下的放电模式。通过放电现象发现对维持大面积均匀辉光放电影响最大的因素是采用介质阻挡和放电气体的组成,影响较小的是放电电压。放电间隙在可维持放电的间隙范围内对放电模式影响很小。实验得出,改变这些条件会使均匀辉光放电中出现放电丝,或完全转变为丝状放电甚至熄灭。

The impact of the atmospheric pressure glow discharge conditions,including but not limited to the dielectric barrier,discharge voltage,RF power,compositions of gases and gap-width,on the homogeneity of the large area RF-plasma discharge were experimentally investigated with a single-lens reflex camera and an intensified charge coupled device（ICCD）camera.The preliminary results show that the large area uniformity of glow discharge depends significantly on the dielectric barrier and compositions of discharge gases,weakly on the discharge voltage,and little on the width of discharge gap within the maintainable discharge range.In addition,we found that the poor discharge conditions resulted in different discharge modes,such as localized filaments discharge,dominance of filaments discharge,or even a discharge extinguishment.