摘要
综述了近年来关于三氯氢硅(Si HCl3)流化床制备颗粒状多晶硅工艺技术研究状况,详细介绍了国内外关于颗粒状多晶硅制备流化床设备的设计思路及制备情况,并讨论了反应器制备方法对产品纯度的影响,分析了"热壁流化床"的技术缺陷,"冷壁流化床"的技术优势,对下一步流化床技术发展进行了展望。
Recent research status of granular polysilicon preparation technology with Si HCl3 fluidized bed was reviewed. The design ideas and development status of fluidized bed reactor for granular polysilicon preparation were introduced in detail. The influence of reactor preparation methods on the product purity was also discussed. Technical defects of ＂hot wall fluidized bed＂ were analyzed as well as advantages of ＂cold wall fluidized bed＂. Finally, development trend of the fluidized bed technology was prospected.
出处
《当代化工》
CAS
2015年第2期301-304,共4页
Contemporary Chemical Industry
关键词
三氯氢硅烷
流化床
粒状多晶硅
SiHCl3
Fluidized bed reactor
Granular polysilicon
