等离子体诊断中扫描电压源的研制

Develpment of Scanning Power to the Plasma Diagnosis

详细叙述了扫描电压源的硬件和软件组成,并通过采用PCI-6251数据采集卡、PA93功率放大电路和虚拟仪器软件LabVIEW及工控机相结合,突破了关键技术,成功研制了一套扫描电压源并应用于等离子体诊断,使整个测试过程非常快,可以在秒级的时间内完成,相对于手动测试,该实验得到的数据更为精确,实时获得了等离子体的伏安(I-V)特性曲线和数据处理结果。

The hardware and software of scanning power supply are described. It provides an automatic and convenient way to measure characteristic parameters of plasma by Langmuir probe,thus,it is a key innovation point that is using software programmed by the graphical language LabVIEW,and it makes use of the computer hardware and software to control instruments. The design of hardware and software is presented in detail. The hardware consist of PCI-6251 acquisition data card,High-voltage power operational amplifier PA93,ISO 100 AP,and NI virtual software LabVIEW. It is more accurate than the manual method,and it can deal with data and get the plasma（ I-V） curve in time.