摘要
为分析光学平面面形偏差,以直径100mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的面形偏差。计算并分析了波面偏差指标峰谷值PV和均方根值RMS,将计算结果与利用ZYGO斐索干涉仪测得的数据对比,偏差为10-3λ,符合光学检测要求。综合考虑可操作性和计算精度,这种基于ASTM的方法是一种行之有效的光学检测分析方法。
In order to obtain the optical plane surface error,firstly interference fringes of optical plane were collected through Fizeau interferometer on a 100 mm optical flat.Then,according to American Society for Testing and Materials(ASTM)standard method,the optical plane surface was tested by analysis of the interference fringes with horizontal method and longitudinal method.The result tells the optical plane surface error qualitatively and intuitively.Finally,the values of the RMSand PV were calculated,and compared with the data collected by ZYGO interferometer.The difference between them is 10-3λapproximately.The result satisfies the requirement of optical testing.Thus,ASTM method is the effective choice if operability and precision are comprehensively considered.
出处
《光学仪器》
2015年第1期4-8,共5页
Optical Instruments
关键词
斐索干涉仪
干涉图
平面面形检测
ASTM方法
Fizeau interferometer
interference fringes
plane surface measurement
American Society for Testing and Materials(ASTM)method
