摘要
利用低压等离子体增强化学气相沉积技术制备碳氢辉光放电聚合物(GDP)和全氘代辉光放电聚合物(D-GDP)薄膜。利用表面轮廓仪、傅里叶红外光谱仪和纳米压痕技术对制备的样品进行表征,讨论了GDP/D-GDP薄膜的沉积速率、化学结构和力学性能在ICF物理实验用靶应用中的优缺点。结果表明:GDP/D-GDP薄膜的沉积速率都随反应气体流量比例近线性增加,GDP的沉积速率达到2.6μm,D-GDP的沉积速率达到1μm,GDP的沉积速率远大于D-GDP的沉积速率;D-GDP薄膜内部的交联化程度较弱,D-GDP更有利于靶丸内燃料的红外均化;GDP的力学性能明显优于D-GDP,更有利于ICF物理实验用靶的燃料填充与装配操作。
Taking advantage of low pressure plasma chemical vapor deposition technology,the hydrocarbon glow discharge polymer（GDP）and deuterated glow discharge polymer（D-GDP）films were fabricated by glow discharge polymerization technology.The deposition rates,the chemical structures and mechanical properties of films were studied by FTIR spectra,surface profiler and nano-indentation.The results show that the deposition rate of GDP/D-GDP almost linearly increases with the increase of gas flow,the deposition rate of GDP films is higher than that of D-GDP films.The cross-link degree of D-GDP films is lower than that in GDP films.The D-GDP films might be more favorable for IR heating on the DT ice of ICF target.The mechanical property of GDP is better than that of D-GDP.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2015年第3期223-227,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金青年科学基金项目
关键词
辉光放电聚合物
沉积速率
红外均化
力学性能
glow discharge polymer
deposition rate
IR heating
mechanical properties
