高真空蒸发系统检漏技术浅析

Leak detection technology analysis of high vacuum evaporation system

介绍了几种常见的真空系统检漏方法,着重探讨了氦质谱检漏仪的原理和结构,分析了检漏仪的检漏过程,能够帮助工程人员快速有效地寻找到漏点,并给出了常见漏点的解决办法。为真空蒸发系统设备的检漏提供了有意义的借鉴,为设备维护人员提供了参考和帮助。

Several kinds of common vacuum system leak detection method were briefly introduced. The elements and frames of the helium mass spectrometer leak detector emphatically were discussed. The leak detection process of the leak detector was detail analyzed. Therefore, the leakage point could be quickly and efficiently found. Finally, a solution about how to deal with the common leakage point was presented. A meaning reference for the leak of the vacuum evaporation system and a good reference merit for the worker working on maintenance of the equipment were provided.