摘要
AFM(Atomic Force Microscope,原子力显微镜)中的压电陶瓷驱动器具有率相关迟滞非线性特性,这会影响AFM的扫描和定位精度。针对传统静态迟滞模型不能反映系统率相关动态迟滞特性的缺陷,提出Hammerstein模型以描述压电陶瓷驱动器的静态和动态迟滞特性。利用最小二乘支持向量机结合奇异值分解法对模型中的参数进行辨识。实验结果表明,模型能体现压电陶瓷驱动器的率相关迟滞特性,精度高于传统静态迟滞模型,建模方法对此类系统具有较好的应用价值。
The piezoelectric actuator（ PEA） used in the Atomic Force Microscopy（ AFM） possesses a feature of ratedependent hysteresis,which have a negative influence on the scanning and positioning accuracy of AFM. As the traditional static nonlinear hysteresis model can＇t reflect the dynamic frequency characteristics of the system,a Hammerstein model here is proposed to describe the static and dynamic hysteresis characteristics of the PEA. The parameters of the model is identified by the least squares support vector machine（ LS-SVM） algorithm and the singular value decomposition（ SVM） method. The experiment result indicates that the rate-dependent hysteresis is well reflected,and the model accuracy is better than the traditional static hysteresis model,its application value is desirable for the analogous systems.
出处
《传感技术学报》
CAS
CSCD
北大核心
2015年第1期23-27,共5页
Chinese Journal of Sensors and Actuators
基金
国家重点基础研究发展计划基金项目(973)(2011CB013104)
