一种新型MEMS加速度计温度补偿方法研究

Study of a Novel Method of Temperature Compensation for MEMS Accelerometer

为降低环境温度对加速度计测量输出的影响,本文提出了一种新的加速度计温度补偿方法,即三维拟合曲面和计算的补偿方法。本文详细介绍了该温度补偿方法的具体原理和实现方法,并用实验进行了验证,实验结果表明加速度计最大零位漂移由温度补偿前的500 m V缩小为温度补偿后的50 m V,即温漂缩小了一个数量级,补偿效果明显。

In order to decrease the impact of temperature on accelerometer,a novel method of temperature compensation for accelerometer is proposed. That is three-dimensional fit curved surface and computing method. The principle and method of realization of this temperature compensation is presented in detail. It is verified by practical examples. It has been shown that the biggest zero temperature drift of accelerometer has been reduced from 500 m V to50 m V which is the value after temperature compensation. That is the temperature drift narrows down an order of magnitude. The accelerometer output has a significant improvement.