基于ANSYS Workbench的真空镀膜设备真空室体有限元分析

Finite element analysis of vacuum chamber of a vacuum coating equipment based on ANSYS Workbench

以真空镀膜设备真空室体为研究对象,利用Inventor建立三维模型,导入ANSYS Workbench中进行有限元分析。通过对ANSYS Workbench后处理数据进行分析得出真空室体在标准大气压作用下的总变形量、等效应力、等效应变分布规律,根据分析结果结合技术要求对真空室体结构进行优化设计。

Take the vacuum chamber of a vacuum coating equipment as the research object,establish the 3D model of vacuum chamber in Inventor software, then leading the three-dimensional model into finite element analysis software ANSYS Workbench. Total deformation, equivalent stress and equivalent strain under standard atmospheric pressure were carried out. On the basis of the results the vacuum chamber is optimized.