RH真空系统真空度异常的判断与处理

RH Vacuum System Vacuum Degree of Abnormality Judgment and Handling

分析了真空泵系统的组成和工作原理,详细论述了造成真空度异常的各种原因和处理方法,有效地解决了真空处理过程中出现的各类故障,以此提高生产效率。

This paper analyzes the composition and working principle of vacuum systems, discussed in detail the various causes and treatment methods cause abnormal degree of vacuum, effectively solve the various types of failures occurred during vacuum treatment, in order to improve production efficiency.