气囊抛光路径对光学元件中频误差的影响

The Effect of Polishing Paths on the Mid-frequency Error of Optical Components

为了寻找消除中频误差的有效抛光路径,进行了2组实验.第1组实验采用单步进动Z字光栅路径和单步进动螺旋线路径对石英玻璃进行全面均匀的气囊抛光实验,并对加工后得到试件表面的中频误差进行分析.第2组实验先采用单步进动Z字光栅路径对石英玻璃进行全面均匀的气囊抛光实验,接着用基于改进普里姆(Prim)算法的路径对其进行加工,最后对加工得到光学试件表面的中频误差进行分析,从而验证基于改进Prim算法的抛光路径的优良性.

In order to find an effective polishing path to eliminate the mid-frequency errors（MFE）of optical components,the paper carried out two group of experiments.The first set of bonnet uniform polishing experiments on the quartz glasses used single precession of Z-raster path and spiral path.Then the mid-frequency errors obtained after processing surfaces of the optical specimens were analyzed.The second set of bonnet uniform polishing experiments on the quartz glasses were firstly conducted using single precession of Z-raster path,and then the quartz glasses were polished by the path based on improving Prim algorithm.Finally we verify the excellent improvements of the path based on improving Prim algorithm by analyzing the mid-frequency errors obtained after processing surfaces of the optical specimens.