纤毛式MEMS矢量水听器的优化设计与测试

Optimization design and test of cilium-type vector hydrophone based on MEMS

针对目前MEMS仿生矢量水听器灵敏度偏低和现有封装结构的固有机械特性对芯片拾振特性影响很大的问题,对该结构水听器从两个方面进行优化设计,一是提出一种新型纤毛材料碳棒代替光纤,二是提出嵌入式透声帽封装结构。首先理论分析纤毛和封装对水听器灵敏度和频带的影响,并用ANSYS软件对其进行仿真,最后对加工的水听器样机进行频响和指向性测试。测试结果表明：在25~300Hz,优化后的水听器灵敏度提高了5dB;在300~1 000Hz,优化后水听器灵敏度提高10dB,优化后水听器的共振峰明显后移,拓宽了水听器的工作频带,且具有良好的指向性,为水听器进一步的发展和工程应用奠定了基础。

Aiming at problems that existing MEMS bionic vector hydrophone has low sensitivity and inherent mechanical properties have a great influence on chip of vibration picking,hydrophone is optimized from two aspects： a new type of cilia material carbon rod instead of optical fiber and embedded encapsulation structure is proposed. Firstly,analyze influence of cilia and encapsulation of hydrophone on sensitivity and frequency band of hydrophone; then conduct simulation by ANSYS. Finally,hydrophone prototype has been tested. The testing results show that performance of hydrophone is greatly improved compared with that of the previous,with a sensitivity improved about 5dB at range of 25 ~ 300Hz and about 10dB at range of 300 ~ 1 000Hz,resonance peak of optimized hydrophone is obviously,operation frequency band is broaden and has good directivity which lay foundation for further development of hydrophone and engineering applications.