摘要
介绍了一种应用激光平面干涉仪从入射面检测锥体棱镜直角误差的方法。棱镜被测角通过一个夹具被预置一个初始角,使射入棱镜内的测试平行光垂直于被测角棱,经被测直角的两个面反射后形成全反射光路,当射出的光与测试平行光重合时产生干涉,实现对锥体棱镜直角误差的测量。介绍了测量、干涉条纹图形分析和直角误差计算的方法,并与传统检测方法进行了比较。结果表明,该方法具有操作简单、测量准确、计算精度高等特点,适合于高精度锥体棱镜(α≤3″)的直角误差测量。
A method for orthogonal error measuring in pyramidal prism with laser plane interferometer is presented. In this method, the pyramidal prism angle under test is set with an initial angle. One measuring jig is applied to guarantee that the incident light traversing the prism is perpendicular to the angle ridge under test to form an integrated light path. When the outlet light interferes with the parallel light from testing interferometer, orthogonal error in pyramidal prism is achieved.
出处
《光学技术》
CAS
CSCD
北大核心
2015年第2期148-151,共4页
Optical Technique
关键词
锥体棱镜
直角误差
测量方法
pyramidal prism
orthogonal error
measurement methods
