球面基底上制作微柱面透镜工艺研究

Research on the Process of Fabricating Micro-cylindrical Lens on a Spherical Substrate

针对目前在球面基底上制作微透镜阵列工艺复杂,制作成本昂贵等问题,介绍了一种激光直写光刻和光刻胶热熔成型相结合的新的加工技术。为此改造了球面刻划机,搭建了405nm激光曝光光源系统,同时建立三维坐标体系,实现微透镜阵列在球面空间位置的定位。在理论分析和合理设计的基础上,使用BP212正性光刻胶在口径50mm,曲率半径60mm的球面基底上制作出线宽为50μm,矢高为2μm,切面曲率半径约为157μm的微柱面透镜阵列,并给出了测试结果。结果表明:在球面基底曲率半径一定时,通过阶梯升温光刻胶和对其快速冷却等微细加工方法,克服了光刻胶熔融状态时的流动性问题,证明此种加工方法对球面微透镜阵列的制作具有很好的可行性。

As the current issues,fabrication of micro-lens array on a spherical substrate complex process,expensive fabrication costs and others.This paper describes a new technology laser direct-write lithography combining photo-resist hot melt molding process.To this end,it transforms the spherical ruling machine by building a 405 nm laser exposure light source system.While establishing a three-dimensional coordinate system,it successfully achieved the localization in a spherical micro-lens array spatial location.On the basis of theoretical analysis and rational design,We used BP212 prepared a cylindrical micro lens array with caliber 50 mm,60mm curvature radius and the line width of 50μm on the spherical base,vector height of the micro-cylindrical lens array 2μm,and curvature radius about 157μm,in order to give us these following results.It shows that we can easily overcome the liquidity at the resist molten state,under the constant curvature radius of the spherical base,by gradually warm-up and rapidly cold-down.As the result,our process,for fabrication of spherical micro-lens array,has promising viability.