核辐射探测器金刚石膜制备技术研究

Research on the Diamond Film Technology which Prepared for Nuclear Radiation Detector

根据核辐射探测器的要求,研究了不同处理方式下的基片对金刚石膜质量的影响以及气源中不同甲烷浓度对金刚石膜质量的影响。采用微波等离子体化学气相沉积法在Si(100)基片上制备出了金刚石薄膜,并通过扫描电子显微镜、X射线衍射和激光Raman光谱分别对金刚石膜的表面及截面形貌、晶体取向和纯度进行分析。实验结果表明:用金刚石粉研磨基片有利于金刚石膜沉积;甲烷浓度过高或过低都不利于制备高质量的金刚石膜;当CH4/H2为1.4/400时制备的金刚石薄膜(111)晶面择优取向最好。根据研究所获得的对金刚石薄膜质量影响规律,制备了达到辐射探测器质量要求的金刚石膜。

According to the requirements of nuclear radiation detector,the effects of different pretreatment of substrate on the preparation of diamond films and the effects of different concentrations methane on the quality of diamond films are studied. Using microwave plasma chemical vapor deposition method diamond films on Si（ 100） substrates were prepared,and the diamond film surfaces and their cross section morphology,crystal orientation,purity are analyzed by scanning electron microscopy（ SEM）,X-ray diffraction（ XRD） and laser Raman spectroscopy. The results show that,the use of diamond powder abrasive substrate is conducive to the deposition of diamond films; too high or too low methane concentration is not conducive to the growth of high quality diamond film preparation. When CH4/ H2 is 1. 4 /400,the diamond thin films（ 111） preferred orientation is the best. According to the study on the quality of diamond film,the diamond film which meets the requirements of the Radiation detector has been prepared.